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Guoxing Technology Box Vacuum Plasma Treatment System GX-V1503

Guoxing Technology Box Vacuum Plasma Treatment System GX-V1503

Sales Advisory Hotline:+86 189 0525 0399

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箱式真空等離子體處理系統(tǒng)GX-V1503

主機尺寸:2000W x 1700D x 2500H mm(可定制化)

真空腔體尺寸1140W x 1560D x 960H mm(可定制化)

電極板配置16 片垂直電極板,15 個處理位置

有效區(qū)域1115W x 630H mm(可定制化)

等離子體電源:定制化

工藝氣體控制

標配:

O2、N2:0~5000sccm;

CF4:0~400sccm;

Ar:0~2000sccm;

可選: 額外一路工藝氣體,流量范圍可定制

Yangzhou Guoxing Technology Co., Ltd
Tel:+86 189 0525 0399
Add:No. 6 Factory Building, No. 63 Chenxiang Group, 309 County Road, Daqiao Town, Jiangdu District, Yangzhou City (Yangzhou Factory)
No. 8-4, Pingxiang Road, Kunshan City, Jiangsu Province (Kunshan Office)
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